特气柜实验室用各类气体管理科航阀门配件产品概述：

电子特气管道系统，简称特气系统由存储、输送、分配、控制四类组成，其中“存储"是指气源部分（特气柜GC），“输送"指配(pei)管(guan)(guan)方(fang)面（一般用双(shuang)套管(guan)(guan)），“分配(pei)"指二次配(pei)部(bu)分（气体分配(pei)柜(ju)VMB），“控制"指监督控制部(bu)分（气体管(guan)(guan)理系统GMS）。是一种广(guang)泛(fan)应用于(yu)半(ban)导体、集成电路(lu)、光纤、太阳能电池等微(wei)电子行业(ye)的(de)气路(lu)系统。

全自动GC（特气柜）按功能(neng)设计(ji)可分(fen)为单钢瓶、双钢瓶、三钢瓶。

单(dan)钢的设计通常使(shi)用(yong)(yong)于(yu)研究机构或(huo)实验室等(deng)。工艺制(zhi)(zhi)程尚(shang)未(wei)有量(liang)产，气体使(shi)用(yong)(yong)量(liang)小，现场可随(sui)时协(xie)调(diao)停机进(jin)行钢瓶之更(geng)换，其(qi)优点节省空(kong)间、成本低(di)、但需(xu)透过日常之管理与协(xie)调(diao)以免中断工艺制(zhi)(zhi)程造(zao)成损失。

双钢(gang)(gang)与三(san)钢(gang)(gang)常用(yong)于量产(chan)工厂，工艺制程不允许停机情况，当一(yi)(yi)支(zhi)钢(gang)(gang)瓶(ping)(ping)使用(yong)完后，另一(yi)(yi)支(zhi)备用(yong)钢(gang)(gang)瓶(ping)(ping)会自动转(zhuan)为供(gong)(gong)气(qi)(qi)(qi)，此(ci)两种(zhong)形式(shi)最大(da)的(de)差别是(shi)在吹扫(sao)管路的(de)高(gao)(gao)纯氮气(qi)(qi)(qi)是(shi)以钢(gang)(gang)瓶(ping)(ping)或厂务(wu)端供(gong)(gong)应(ying)(ying)，当吹扫(sao)用(yong)的(de)高(gao)(gao)纯氮气(qi)(qi)(qi)统(tong)(tong)一(yi)(yi)由(you)厂务(wu)端来(lai)供(gong)(gong)应(ying)(ying)时，所有特殊气(qi)(qi)(qi)体供(gong)(gong)应(ying)(ying)系(xi)统(tong)(tong)不管是(shi)否相(xiang)容(rong)，全(quan)部连接到同一(yi)(yi)个供(gong)(gong)应(ying)(ying)源，会有较高(gao)(gao)的(de)风险值(zhi)；万(wan)一(yi)(yi)中央供(gong)(gong)应(ying)(ying)系(xi)统(tong)(tong)的(de)高(gao)(gao)纯氮气(qi)(qi)(qi)中断，警(jing)报系(xi)统(tong)(tong)又损坏，恰巧两种(zhong)不相(xiang)容(rong)的(de)气(qi)(qi)(qi)体同时使用(yong)吹扫(sao)，此(ci)时极有可(ke)(ke)能发(fa)(fa)生爆炸的(de)事件发(fa)(fa)生，相(xiang)同性质可(ke)(ke)使用(yong)同一(yi)(yi)瓶(ping)(ping)钢(gang)(gang)瓶(ping)(ping)来(lai)吹扫(sao)增加(jia)的(de)成(cheng)本及空间(jian)非常有限，是(shi)一(yi)(yi)种(zhong)非常好(hao)的(de)应(ying)(ying)变方式(shi)。

气(qi)(qi)(qi)(qi)(qi)瓶(ping)柜(ju)(ju)(ju)(ju)(ju)(ju)与气(qi)(qi)(qi)(qi)(qi)瓶(ping)架(jia)可采用单工(gong)(gong)艺(yi)(yi)气(qi)(qi)(qi)(qi)(qi)瓶(ping)外(wai)置(zhi)(zhi)(zhi)(zhi)(zhi)吹扫气(qi)(qi)(qi)(qi)(qi)源(yuan)、双工(gong)(gong)艺(yi)(yi)气(qi)(qi)(qi)(qi)(qi)瓶(ping)外(wai)置(zhi)(zhi)(zhi)(zhi)(zhi)吹扫气(qi)(qi)(qi)(qi)(qi)源(yuan)、双工(gong)(gong)艺(yi)(yi)气(qi)(qi)(qi)(qi)(qi)瓶(ping)内置(zhi)(zhi)(zhi)(zhi)(zhi)吹扫气(qi)(qi)(qi)(qi)(qi)源(yuan)等多种(zhong)结构(gou)配(pei)置(zhi)(zhi)(zhi)(zhi)(zhi)；不(bu)(bu)(bu)相容气(qi)(qi)(qi)(qi)(qi)体(ti)瓶(ping)不(bu)(bu)(bu)应(ying)(ying)放置(zhi)(zhi)(zhi)(zhi)(zhi)于同一气(qi)(qi)(qi)(qi)(qi)瓶(ping)柜(ju)(ju)(ju)(ju)(ju)(ju)或气(qi)(qi)(qi)(qi)(qi)瓶(ping)架(jia)中；气(qi)(qi)(qi)(qi)(qi)瓶(ping)柜(ju)(ju)(ju)(ju)(ju)(ju)、气(qi)(qi)(qi)(qi)(qi)瓶(ping)架(jia)应(ying)(ying)设(she)(she)置(zhi)(zhi)(zhi)(zhi)(zhi)作(zuo)业用气(qi)(qi)(qi)(qi)(qi)体(ti)面板；系统的(de)供应(ying)(ying)能力应(ying)(ying)经过热力学和(he)流(liu)体(ti)力学计算核实；气(qi)(qi)(qi)(qi)(qi)瓶(ping)柜(ju)(ju)(ju)(ju)(ju)(ju)闭门时应(ying)(ying)保持不(bu)(bu)(bu)低(di)于100Pa负压，柜(ju)(ju)(ju)(ju)(ju)(ju)内的(de)排风换气(qi)(qi)(qi)(qi)(qi)次数不(bu)(bu)(bu)得(de)低(di)于300次/h;自(zi)燃性、易燃性、毒性、腐蚀(shi)性气(qi)(qi)(qi)(qi)(qi)瓶(ping)柜(ju)(ju)(ju)(ju)(ju)(ju)应(ying)(ying)在(zai)排风出(chu)口设(she)(she)置(zhi)(zhi)(zhi)(zhi)(zhi)固定式气(qi)(qi)(qi)(qi)(qi)体(ti)泄(xie)漏探测器；气(qi)(qi)(qi)(qi)(qi)瓶(ping)柜(ju)(ju)(ju)(ju)(ju)(ju)柜(ju)(ju)(ju)(ju)(ju)(ju)体(ti) 外(wai)壳(qiao)钢(gang)板厚(hou)度(du)不(bu)(bu)(bu)应(ying)(ying)小于2.5mm， 并应(ying)(ying)有(you)防(fang)腐蚀(shi)涂层；气(qi)(qi)(qi)(qi)(qi)瓶(ping)柜(ju)(ju)(ju)(ju)(ju)(ju)门应(ying)(ying)具备自(zi)动关闭功(gong)能， 并应(ying)(ying)配(pei)备防(fang)爆玻璃观(guan)察窗；气(qi)(qi)(qi)(qi)(qi)瓶(ping)柜(ju)(ju)(ju)(ju)(ju)(ju)的(de)固定螺栓设(she)(she)计应(ying)(ying)满足当地(di)地(di)震(zhen)设(she)(she)防(fang)烈度(du)的(de)要求；气(qi)(qi)(qi)(qi)(qi)瓶(ping)柜(ju)(ju)(ju)(ju)(ju)(ju)、气(qi)(qi)(qi)(qi)(qi)瓶(ping)架(jia)应(ying)(ying)设(she)(she)置(zhi)(zhi)(zhi)(zhi)(zhi)清晰明确的(de)安(an)全标(biao)识牌；当气(qi)(qi)(qi)(qi)(qi)瓶(ping)柜(ju)(ju)(ju)(ju)(ju)(ju)放置(zhi)(zhi)(zhi)(zhi)(zhi)在(zai)有(you)爆炸(zha)和(he)火灾危险(xian)环境(jing)时，其设(she)(she)计应(ying)(ying)符合(he)现行国(guo)家标(biao)准《爆炸(zha)危险(xian)环境(jing)电力装置(zhi)(zhi)(zhi)(zhi)(zhi)设(she)(she)计规范》GB50058的(de)有(you)关规定。

是(shi)(shi)专(zhuan)为(wei)腐(fu)(fu)性，毒性等危险(xian)性气(qi)(qi)(qi)体供(gong)应(ying)而设计的(de)供(gong)应(ying)系(xi)统(tong)，主材(cai)选用SS316L，基(ji)本功能包括自动(dong)吹(chui)扫(sao)，自动(dong)切换，以及(ji)自动(dong)切断（当(dang)设定(ding)报警信号(hao)被(bei)触(chu)发时(shi)）。在制(zhi)造业的(de)范畴内，特(te)(te)别是(shi)(shi)涉及(ji)到半导体与高(gao)精(jing)度化学制(zhi)品(pin)的(de)领域，特(te)(te)种(zhong)(zhong)气(qi)(qi)(qi)体（特(te)(te)气(qi)(qi)(qi)）扮演着至(zhi)关重(zhong)要的(de)基(ji)础材(cai)料角色。确保这(zhei)些(xie)气(qi)(qi)(qi)体稳定(ding)、安(an)全(quan)(quan)地(di)供(gong)给到生产线，是(shi)(shi)维(wei)持高(gao)效生产的(de)关键。特(te)(te)气(qi)(qi)(qi)管道工(gong)程(cheng)是(shi)(shi)一(yi)种(zhong)(zhong)危险(xian)性很高(gao)的(de)工(gong)程(cheng)，是(shi)(shi)保证有着易(yi)(yi)燃易(yi)(yi)爆、腐(fu)(fu)蚀(shi)、剧毒等性质的(de)特(te)(te)种(zhong)(zhong)气(qi)(qi)(qi)体的(de)安(an)全(quan)(quan)稳定(ding)输送的(de)气(qi)(qi)(qi)体供(gong)应(ying)系(xi)统(tong)，所以，为(wei)了用气(qi)(qi)(qi)安(an)全(quan)(quan)，在安(an)装特(te)(te)气(qi)(qi)(qi)系(xi)统(tong)时(shi)，要严格(ge)遵(zun)守(shou)其中(zhong)的(de)一(yi)些(xie)规定(ding)标准(zhun)。